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10 Modules / ~100 pages
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Nanoscale Fabrication Techniques
( 30 Modules )

Module #1
Introduction to Nanoscale Fabrication
Overview of nanoscale fabrication, its importance, and applications
Module #2
Nanoscale Fabrication Techniques:An Overview
Survey of top-down and bottom-up approaches to nanoscale fabrication
Module #3
Lithography:Principles and Techniques
Introduction to lithography, photolithography, and extreme ultraviolet lithography
Module #4
Electron Beam Lithography (EBL)
EBL principles, instrumentation, and applications
Module #5
Focused Ion Beam (FIB) Lithography
FIB principles, instrumentation, and applications
Module #6
Scanning Probe Microscopy (SPM) Lithography
SPM principles, instrumentation, and applications
Module #7
Nanoimprint Lithography
Nanoimprint lithography principles, instrumentation, and applications
Module #8
Soft Lithography
Soft lithography principles, instrumentation, and applications
Module #9
Molecular Self-Assembly
Molecular self-assembly principles, techniques, and applications
Module #10
Block Copolymer Lithography
Block copolymer lithography principles, instrumentation, and applications
Module #11
Nanolithography using DNA Origami
DNA origami principles, techniques, and applications
Module #12
Chemical Vapor Deposition (CVD)
CVD principles, instrumentation, and applications
Module #13
Atomic Layer Deposition (ALD)
ALD principles, instrumentation, and applications
Module #14
Physical Vapor Deposition (PVD)
PVD principles, instrumentation, and applications
Module #15
Nanoscale Etching Techniques
Nanoscale etching techniques, including reactive ion etching (RIE) and inductively coupled plasma (ICP) etching
Module #16
Nanoscale Metrology and Characterization
Nanoscale metrology and characterization techniques, including AFM, SEM, and TEM
Module #17
Nanofabrication Challenges and Limitations
Discussion of challenges and limitations in nanoscale fabrication
Module #18
Applications of Nanoscale Fabrication
Survey of applications of nanoscale fabrication in electronics, photonics, and biomedicine
Module #19
Nanoscale Fabrication for Energy Applications
Nanoscale fabrication for energy applications, including solar cells and energy storage
Module #20
Nanoscale Fabrication for Biomedical Applications
Nanoscale fabrication for biomedical applications, including biosensors and tissue engineering
Module #21
Nanoscale Fabrication for Electrochemical Applications
Nanoscale fabrication for electrochemical applications, including fuel cells and electrochemical sensors
Module #22
Nanoscale Fabrication for Optoelectronic Applications
Nanoscale fabrication for optoelectronic applications, including LEDs and photodetectors
Module #23
Nanoscale Fabrication for Lithium-Ion Batteries
Nanoscale fabrication for lithium-ion batteries, including electrode design and optimization
Module #24
Nanoscale Fabrication for Water Purification and Remediation
Nanoscale fabrication for water purification and remediation, including membrane separation and nanocatalysts
Module #25
Nanoscale Fabrication for Advanced Materials
Nanoscale fabrication for advanced materials, including metamaterials and nanocomposites
Module #26
Nanoscale Fabrication for Quantum Computing
Nanoscale fabrication for quantum computing, including superconducting qubits and quantum dots
Module #27
Nanoscale Fabrication for Biomedical Imaging
Nanoscale fabrication for biomedical imaging, including MRI and PET
Module #28
Nanoscale Fabrication for Advanced Manufacturing
Nanoscale fabrication for advanced manufacturing, including 3D printing and nanoscale assembly
Module #29
Safety and Environmental Considerations in Nanoscale Fabrication
Discussion of safety and environmental considerations in nanoscale fabrication
Module #30
Course Wrap-Up & Conclusion
Planning next steps in Nanoscale Fabrication Techniques career


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